Cover image for Robotics for electronics manufacturing : principles and applications in cleanroom automation
Title:
Robotics for electronics manufacturing : principles and applications in cleanroom automation
Personal Author:
Publication Information:
Cambridge ; New York : Cambridge University Press, 2010
Physical Description:
xii, 238 p. : ill. ; 25 cm.
ISBN:
9780521876520

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Item Category 1
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MJIIT Library 33000000001423 TJ211 M3678 2010 Open Access Book
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PSZ JB 30000010277791 TJ211 M3678 2010 Open Access Book Book
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Summary

Summary

Understand the design, testing, and application of cleanroom robotics and automation with this practical guide. From the history and evolution of cleanroom automation to the latest applications and industry standards, this book provides the only complete overview of the topic available. With over 20 years' industry experience in robotics design, Karl Mathia provides numerous real-world examples to enable you to learn from professional experience, maximize the design quality and avoid expensive design pitfalls. You'll also get design guidelines and hands-on tips for reducing design time and cost. Compliance with industry and de-facto standards for design, assembly, and handling is stressed throughout, and detailed discussions of recommended materials for atmospheric and vacuum robots are included to help shorten product development cycles and avoid expensive material testing. This book is the perfect practical reference for engineers working with robotics for electronics manufacturing in a range of industries that rely on cleanroom manufacturing.


Author Notes

Dr. Karl Mathia studied in Germany and the United States and holds advanced degrees in Electrical and Computer Engineering. He has over 20 years of experience in research and development, product development engineering, and has also held management positions at leading robotic firms, including Brooks Automation and Newport Corporation.


Table of Contents

Prefacep. xi
1 Industrial roboticsp. 1
1.1 History of industrial roboticsp. 1
1.2 The global robotics industryp. 2
1.3 Applications and operational stock by regionp. 5
1.4 Socioeconomic impactp. 6
1.5 Definitions, standards, and terminologyp. 7
1.6 Applicable and related standardsp. 11
2 Cleanroom roboticsp. 12
2.1 Manufacturing in cleanroom environmentsp. 12
2.2 Semiconductor manufacturingp. 14
2.3 Flat panel display manufacturingp. 20
2.4 Substrate-handling, robotsp. 23
2.5 Applicable and related standardsp. 28
3 Design of atmospheric robotsp. 30
3.1 Clean materialsp. 30
3.2 Prevention of electrostatic chargep. 37
3.3 Surface finishes for cleanroom roboticsp. 43
3.4 Clean drive trainsp. 48
3.5 Arm compliancep. 53
3.6 End-effectorsp. 60
3.7 Robot assembly and handlingp. 62
3.8 Applicable and related standardsp. 70
4 Design of vacuum robotsp. 73
4.1 Robotics challenges in vacuum environmentsp. 73
4.2 What is vacuum?p. 74
4.3 Static vacuum barrierp. 76
4.4 Dynamic vacuum barrierp. 79
4.5 Clean drive trainsp. 92
4.6 External and internal leaksp. 99
4.7 Materials and surface finishesp. 104
4.8 Assembly and installation of vacuum robotsp. 115
4.9 Applicable and related standardsp. 120
5 Kinematicsp. 124
5.1 Joint space, operational space, and workspacep. 124
5.2 Kinematic robot structuresp. 126
5.3 Mathematical foundationsp. 129
5.4 Forward kinematicsp. 134
5.5 Inverse kinematicsp. 149
5.6 Commercial substrate-handling robotsp. 150
5.7 Applicable and related standardsp. 153
6 Dynamics and controlp. 154
6.1 Manipulator dynamicsp. 154
6.2 Robot motion controlp. 162
6.3 Networked, decentralized robot controlp. 172
6.4 Applicable and related standardsp. 177
7 Test and characterizationp. 179
7.1 Airborne particle contaminationp. 179
7.2 Surface particle contaminationp. 182
7.3 Positioning accuracy and repeatabilityp. 186
7.4 Path accuracy and repeatabilityp. 199
7.5 Vibration analysisp. 206
7.6 Mechanical axis decouplingp. 212
7.7 Applicable and related standardsp. 218
Appendix A SI units and conversion tablesp. 220
Appendix B Standards organizationsp. 223
Appendix C Standard temperature and pressure (STP)p. 225
Referencesp. 226
Indexp. 232